
“Fine-pitch probe card manufacturing involves many lithographic patterning steps, which can significantly drive up cost of ownership,” said Dr. Yong-Ho Cho, CEO of PMT. “We can achieve significant cost savings, faster process development, and improved process performance, by switching from traditional lithography to EV Group’s LITHOSCALE maskless exposure product. We look forward to future collaborations with EVG leveraging LITHOSCALE and other process solutions for advanced probe card manufacturing.”
Incorporating EVG’s MLE™ (maskless publicity) know-how, LITHOSCALE addresses lithography wants for markets and purposes that require a excessive diploma of flexibility or product variation. LITHOSCALE tackles legacy bottlenecks by combining highly effective digital processing that permits real-time information switch and instant publicity, excessive structuring decision and throughput scalability. It’s ideally suited to fast prototyping, offering quick turnaround and R&D cycle instances.
MEMS manufacturing specifically poses challenges for lithography as a consequence of its advanced product mixes, which drive up masks overhead prices. LITHOSCALE’s mask-free method eliminates mask-related consumables, addressing the demand for low-cost-of-ownership patterning in wafer probe card manufacturing. As well as, LITHOSCALE’s excessive depth of focus and excessive decision (sub-2-micron L/S) permits maskless patterning of dense redistribution layer (RDL) and through connections, which helps know-how scaling for fine-pitch probe playing cards.
In response to Younger-Sik Yun, normal supervisor of EV Group Korea, “Wafer-level testing with probe cards is an essential process for improving device production yields and reducing overall test cost per die. LITHOSCALE offers a unique combination of high resolution, high flexibility to handle many different product designs, and low cost of ownership, making it an ideal solution for manufacturing fine-pitch wafer probe cards. We are pleased to support PMT in their efforts to expand their product portfolio and shorten their development cycles.”


About EV Group (EVG)
EV Group (EVG) is a number one provider of kit and course of options for the manufacture of semiconductors, microelectromechanical techniques (MEMS), compound semiconductors, energy units and nanotechnology units. Key merchandise embody wafer bonding, thin-wafer processing, lithography/nanoimprint lithography (NIL) and metrology gear, in addition to photoresist coaters, cleaners and inspection techniques. Based in 1980, EV Group providers and helps an elaborate community of world prospects and companions everywhere in the world. Extra details about EVG is accessible at www.EVGroup.com.
About PROTEC MEMS Know-how
PROTEC MEMS Know-how Inc. (PMT), a producer of semiconductor inspection units, was based in Might 2004 as Microfriend Inc. and was enlisted on the KOSDAQ in December 2016. In March 2023, Microfriend Inc. modified its identify to PROTEC MEMS Know-how Inc. (PMT). PMT is a aggressive main producer that’s always rising with next-generation probe playing cards primarily based on MEMS know-how as its essential enterprise. MEMS probe playing cards, the principle product of PMT, are a high-value consumable system that’s used within the remaining inspection course of for semiconductor wafer. MEMS probe playing cards are developed with PMT’s personal MEMS know-how and are at the moment manufactured with 12-inch degree ceramic substrates for reminiscence purposes. PMT is a options supplier not just for probe playing cards, but additionally various check merchandise associated to know-how with MEMS purposes.
For extra data, please go to PMT’s homepage: www.pmt23.com.
PMT Contact:
Hwang-Jin Yeo
Common Director
PROTEC MEMS Know-how (PMT)
Tel: +82-41-423-0222
E-mail: hjyeo@pmt23.com